Vacuum Furnace

EQ-RTP-1000D4 is a compact rapid thermal processing tube furnace with 4" I.D. processing quartz tube and vacuum flange. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. RTP-1000D4 is heated by 10KW halogen light with max. 120°C/second heating rate. 50 segment precision temperature controller is built in with ±1°C. accuracy. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.