450mm wafer capable, Load-Lock ChamberOXFORD PLASMAPRO NGP1000 ICP 380 ETCHER consisting of:

- Model: Oxford PlasmaPro NGP1000 ICP380 ETCHER
- Load Locked Chamber
- 490mm Diameter Aluminum Lower Electrode
- Capable of running up 450mm wafers
- System PC, Keyboard, Mouse
- Windows 7 w/ PC4000 Control Software
- X20 PLC
- Heated or Fluid-Cooled RIE Etch Lower Electrode w/ 3,000W, 13.56MHz RF Generator
- 208V ICP380 Source w/ 5kW, 2MHz RF Generator w/ Electrostatic Shield
- Dual Magnetic Spacer for improved ICP uniformity with little to no RIE Power
- Mechanical Wafer Clamping
- Optical Endpoint Detector
- Pneumatic Chamber Lift Kit
- Chamber Heating Kit
- Adixen ATH1600MT Turbo Pump
- Adixen ADP122P Dry Pump
- Adixen ACP40G Dry Pump
- Julabo FC1600 Chiller
- Operations Manual and Documentation
- Fully Refurbished to excellent condition (see below details)
- Vintage 2013

X20 External Gas Box with up to 12 Gas Lines. Currently Configured for:
- BCL3
- N2
- CL2
- HBr
- SF6
- CF4
- Ar
- 02

OXFORD REFURBISHMENT PROCESS consists of:
- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines purged.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

Oxford

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